Oxide Charging Damage in Integrated Circuit Processing Investigated with a Coupled Plasma/IC Device Model
Author | : William George En |
Publisher | : |
Total Pages | : 374 |
Release | : 1996 |
ISBN-10 | : UCAL:C3390253 |
ISBN-13 | : |
Rating | : 4/5 ( Downloads) |
Book Synopsis Oxide Charging Damage in Integrated Circuit Processing Investigated with a Coupled Plasma/IC Device Model by : William George En
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