Optical Diagnostics Systems Supplementing Integrated Materials Processing Facility of Major University Research Initiative
Author | : |
Publisher | : |
Total Pages | : 0 |
Release | : 2001 |
ISBN-10 | : OCLC:946230633 |
ISBN-13 | : |
Rating | : 4/5 ( Downloads) |
Download or read book Optical Diagnostics Systems Supplementing Integrated Materials Processing Facility of Major University Research Initiative written by and published by . This book was released on 2001 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: As part of the DoD-MURI research program entitled 'Modeling and control of Advanced Chemical Vapor Deposition Processes: the Control of Defects in Mixed III-V Compound Semiconductors' (Grant F49620-95-1-0447), DURIP funding was provided to establish a real-time optical characterization facility to study thin-film growth processes extended to super-atmospheric pressures. The extension of the chemical vapor deposition (CVD) to operating conditions at super-atmospheric pressures mandated validation of: (a) Simulations of surface reaction kinetics; (b) Simulations of homogeneous gas phase reactions coupled to transport in laminar high density vapor flows; and (c) the development of experimental methods for the detection of onset of turbulence, that is, verification of laminar flow under conditions of high pressure OMCVD.