Atomic Layer Deposition Applications 5
Author | : S. de Gendt |
Publisher | : The Electrochemical Society |
Total Pages | : 425 |
Release | : 2009-09 |
ISBN-10 | : 9781566777414 |
ISBN-13 | : 1566777410 |
Rating | : 4/5 (410 Downloads) |
Book Synopsis Atomic Layer Deposition Applications 5 by : S. de Gendt
Download or read book Atomic Layer Deposition Applications 5 written by S. de Gendt and published by The Electrochemical Society. This book was released on 2009-09 with total page 425 pages. Available in PDF, EPUB and Kindle. Book excerpt: Atomic Layer Deposition can enable precise deposition of ultra-thin, highly conformal coatings over complex 3D topography, with controlled composition and properties for a wide range of applications.