A Study of Group III Elements (La, Gd, Eu, and Al) Incorporation on Metal Gate/high-k Stacks for Advanced CMOS Applications
| Author | : Bongmook Lee |
| Publisher | : |
| Total Pages | : 199 |
| Release | : 2010 |
| ISBN-10 | : OCLC:624168063 |
| ISBN-13 | : |
| Rating | : 4/5 ( Downloads) |
Book Synopsis A Study of Group III Elements (La, Gd, Eu, and Al) Incorporation on Metal Gate/high-k Stacks for Advanced CMOS Applications by : Bongmook Lee
Download or read book A Study of Group III Elements (La, Gd, Eu, and Al) Incorporation on Metal Gate/high-k Stacks for Advanced CMOS Applications written by Bongmook Lee and published by . This book was released on 2010 with total page 199 pages. Available in PDF, EPUB and Kindle. Book excerpt: Keywords: gate stack, reliability, advanced CMOS, high-k, metal gate, Vt tuning, work function.