Vacuum Evaporated and Cathodic Sputtered Thin Films

Download or read book Vacuum Evaporated and Cathodic Sputtered Thin Films written by E. Krikorian and published by . This book was released on 1964 with total page 82 pages. Available in PDF, EPUB and Kindle. Book excerpt: The effects of formation conditions on the epitaxial growth of thin films deposited by cathodic sputtering and vacuum evaporation are reported. The primary condition parameters considered are substrate temperature and rate of deposition. Trends have also been established for the effect of thickness, annealing and residual gas pressure. The results of a detailed investigation of Ge sputtered onto single crystal Ge, both (111) and (100), and (111) CaF2, are presented. Less detailed, but consistent results were obtained for identical film-substrate systems obtained by vacuum deposition. Data are also included for Ge deposited on single crystal Si, mica, amorphous quartz and glass. Other film-substrate systems considered include gold on rock salt and glass, silver on rock salt, and Si on Si. (Author).