Ultrasonic nano/microfabrication, handling and driving is an emerging actuation technology, which utilizes ultrasonic vibration and the physical effects of ultr

Ultrasonic imaging is an economic, reliable diagnostic technique. Owing to recent therapeutic applications, understanding the physical principles of medical ult

Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews differe