The papers contained in the volume represent lectures delivered as a 1983 NATO ASI, held at Urbino, Italy. The lecture series was designed to identify the key s

This book is devoted to the physics of electron-beam, ion-beam, optical, and x-ray lithography. The need for this book results from the following considerations

Research on electronic transport in ultra small dimensions has been highly stimulated by the sensational developments in silicon technology and very large scale

This book is an introduction to the principles of semiconductor physics, linking its scientific aspects with practical applications. It is addressed to both rea

The purposes of this book are many. First, we must point out that it is not a device book, as a proper treatment of the range of important devices would require