This is a comprehensive description of the theoretical foundations and experimental applications of spectroscopic methods in plasma physics research. It introdu

Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are exper

Although based on lectures given for graduate students and postgraduates starting in plasma physics, this concise introduction to the fundamental processes and

The book provides an up-to-date account of inductively coupled plasmas and their use in atomic emission spectroscopy and mass spectrometry. Specific application

This book is the most comprehensive publication on MWP technology and MWP-OES analytical spectrometry with an emphasis on practical issues.