Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are exper

TO THE SECOND EDITION In the nine years since this book was first written, rapid progress has been made scientifically in nuclear fusion, space physics, and non

This book provides a survey of the latest research and developments in plasma technology. In an easy and comprehensive manner, it explores what plasma is and th

Based on a project backed by the European Union, this is a must-have resource for researchers in industry and academia concerned with application-oriented plasm

This unified introduction provides the tools and techniques needed to analyze plasmas and connects plasma phenomena to other fields of study. Combining mathemat