Developments in Surface Contamination and Cleaning, Volume 3

Developments in Surface Contamination and Cleaning, Volume 3
Author :
Publisher : William Andrew
Total Pages : 259
Release :
ISBN-10 : 9781437778861
ISBN-13 : 1437778860
Rating : 4/5 (860 Downloads)

Book Synopsis Developments in Surface Contamination and Cleaning, Volume 3 by : Rajiv Kohli

Download or read book Developments in Surface Contamination and Cleaning, Volume 3 written by Rajiv Kohli and published by William Andrew. This book was released on 2011-03-25 with total page 259 pages. Available in PDF, EPUB and Kindle. Book excerpt: The contributions in this volume cover methods for removal of particle contaminants on surfaces. Several of these methods are well established and have been employed in industrial applications for a long time. However, the ever- higher demand for removal of smaller particles on newer substrate materials is driving continuous development of the established cleaning methods and alternative innovative methods for particle removal. This book provides information on the latest developments in this topic area. - Comprehensive coverage of innovations in surface contamination and cleaning - Written by established experts in the contamination and cleaning field - Each chapter is a comprehensive review of the state of the art - Case studies included


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As device sizes in the semiconductor industries shrink, devices become more vulnerable to smaller contaminant particles, and most conventional cleaning techniqu