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Proceedings of the Symposia on Electrochemical Processing in ULSI Fabrication I
Language: en
Pages: 290

Proceedings of the Symposia on Electrochemical Processing in ULSI Fabrication I

Authors: Electrochemical Society. Dielectric Science and Technology Division
Categories: Science
Type: BOOK - Published: 1999 - Publisher:

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Morphological Evolution of Electrodeposits and Electrochemical Processing in ULSI Fabrication and Electrodeposition of and on Semiconductors IV
Language: en
Pages: 422

Morphological Evolution of Electrodeposits and Electrochemical Processing in ULSI Fabrication and Electrodeposition of and on Semiconductors IV

Authors: Kazuo Kondo
Categories: Copper plating
Type: BOOK - Published: 2005 - Publisher: The Electrochemical Society

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Papers in this volume are from the 199th ECS Meeting, held in Washington, DC, Spring 2001. Morphology evolution encompasses electrochemical processing in ULSI f
Electrochemical Processing in ULSI Fabrication and Semiconductor/metal Deposition II
Language: en
Pages: 418

Electrochemical Processing in ULSI Fabrication and Semiconductor/metal Deposition II

Authors: Panayotis C. Andricacos
Categories: Science
Type: BOOK - Published: 1999 - Publisher: The Electrochemical Society

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Electrochemical Processing in ULSI Fabrication III
Language: en
Pages: 262

Electrochemical Processing in ULSI Fabrication III

Authors: Panayotis C. Andricacos
Categories: Computers
Type: BOOK - Published: 2002 - Publisher: The Electrochemical Society

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"Held May 2000 in Toronto, Canada, as part of the 197th meeting of the Electrochemical Society."--Pref.
Interconnect and Contact Metallization for ULSI
Language: en
Pages: 358

Interconnect and Contact Metallization for ULSI

Authors: G. S. Mathad
Categories: Science
Type: BOOK - Published: 2000 - Publisher: The Electrochemical Society

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