Physics and Technology of High-k Gate Dielectrics 5
| Author | : Samares Kar |
| Publisher | : The Electrochemical Society |
| Total Pages | : 676 |
| Release | : 2007 |
| ISBN-10 | : 9781566775700 |
| ISBN-13 | : 1566775701 |
| Rating | : 4/5 (701 Downloads) |
Book Synopsis Physics and Technology of High-k Gate Dielectrics 5 by : Samares Kar
Download or read book Physics and Technology of High-k Gate Dielectrics 5 written by Samares Kar and published by The Electrochemical Society. This book was released on 2007 with total page 676 pages. Available in PDF, EPUB and Kindle. Book excerpt: This issue covers in detail all aspects of the physics and the technology of high dielectric constant gate stacks, including high mobility substrates, high dielectric constant materials, processing, metals for gate electrodes, interfaces, physical, chemical, and electrical characterization, gate stack reliability, and DRAM and non-volatile memories.