Microfabricated Silicon High Aspect Ratio Flexures for In-plane Motion

Microfabricated Silicon High Aspect Ratio Flexures for In-plane Motion
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Publisher :
Total Pages : 750
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ISBN-10 : UCAL:C3410055
ISBN-13 :
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Book Synopsis Microfabricated Silicon High Aspect Ratio Flexures for In-plane Motion by : Christopher Guild Keller

Download or read book Microfabricated Silicon High Aspect Ratio Flexures for In-plane Motion written by Christopher Guild Keller and published by . This book was released on 1998 with total page 750 pages. Available in PDF, EPUB and Kindle. Book excerpt:


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