Micro Electro-fabrication outlines three major nanoscale electro-fabrication techniques, including electro-discharge machining, electrochemical machining and el

Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology is the first book solely dedicated to electrochemical micromachining (EMM). It begin

Micro Electro Discharge Machining (EDM) is a prominent technology for the fabrication of micro components in many fields. Nowadays, it is used like a convention

This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for proces

MEMS technology is increasingly penetrating into our lives and improving our quality of life. In parallel to this, advances in nanotechnology and nanomaterials