All areas of optical MEMS, including terahertz, and nanophotonic technologies, particularly with mechanical or phonon interactions, including device physics, de

This book covers device design fundamentals and system applications in optical MEMS and nanophotonics. Expert authors showcase examples of how fusion of nanoele

This book is a printed edition of the Special Issue Optical MEMS that was published in Micromachines

The IEEE International Conference on Optical MEMS and Nanophotonics is an annual conference that draws in leading researchers harnessing light, or photons, and