Incorporation of Metal Silicides and Refractory Metals in VLSI Technology

Incorporation of Metal Silicides and Refractory Metals in VLSI Technology
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Book Synopsis Incorporation of Metal Silicides and Refractory Metals in VLSI Technology by : C. M. Osburn

Download or read book Incorporation of Metal Silicides and Refractory Metals in VLSI Technology written by C. M. Osburn and published by . This book was released on 1991 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:


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Most of the subject matter of this book has previously been available only in the form of research papers and review articles. I have not attempted to refer to