Characterization, Integration and Reliability of HfO 2 and LaLuO 3 High-kappa-metal Gate Stacks for CMOS Applications

Characterization, Integration and Reliability of HfO 2 and LaLuO 3 High-kappa-metal Gate Stacks for CMOS Applications
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Book Synopsis Characterization, Integration and Reliability of HfO 2 and LaLuO 3 High-kappa-metal Gate Stacks for CMOS Applications by : Alexander Nichau

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Keywords: gate stack, reliability, advanced CMOS, high-k, metal gate, Vt tuning, work function.