Advanced Processes for 193-nm Immersion Lithography

Advanced Processes for 193-nm Immersion Lithography
Author :
Publisher : SPIE Press
Total Pages : 338
Release :
ISBN-10 : 9780819475572
ISBN-13 : 0819475572
Rating : 4/5 (572 Downloads)

Book Synopsis Advanced Processes for 193-nm Immersion Lithography by : Yayi Wei

Download or read book Advanced Processes for 193-nm Immersion Lithography written by Yayi Wei and published by SPIE Press. This book was released on 2009 with total page 338 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is a comprehensive guide to advanced processes and materials used in 193-nm immersion lithography (193i). It is an important text for those new to the field as well as for current practitioners who want to broaden their understanding of this latest technology. The book can be used as course material for graduate students of electrical engineering, material sciences, physics, chemistry, and microelectronics engineering and can also be used to train engineers involved in the manufacture of integrated circuits. It provides techniques for selecting critical materials (topcoats, photoresists, and antireflective coatings) and optimizing immersion processes to ensure higher performance and lower defectivity at lower cost. This book also includes sections on shrinking, trimming, and smoothing of the resist pattern to reduce feature sizes and line-edge roughness. Finally, it describes the recent development of 193i in combination with double exposure and double patterning.


Advanced Processes for 193-nm Immersion Lithography Related Books

Advanced Processes for 193-nm Immersion Lithography
Language: en
Pages: 338
Authors: Yayi Wei
Categories: Art
Type: BOOK - Published: 2009 - Publisher: SPIE Press

DOWNLOAD EBOOK

This book is a comprehensive guide to advanced processes and materials used in 193-nm immersion lithography (193i). It is an important text for those new to the
Nanolithography
Language: en
Pages: 599
Authors: M Feldman
Categories: Technology & Engineering
Type: BOOK - Published: 2014-02-13 - Publisher: Woodhead Publishing

DOWNLOAD EBOOK

Integrated circuits, and devices fabricated using the techniques developed for integrated circuits, have steadily gotten smaller, more complex, and more powerfu
Polymers and Electromagnetic Radiation
Language: en
Pages: 361
Authors: Wolfram Schnabel
Categories: Technology & Engineering
Type: BOOK - Published: 2014-01-10 - Publisher: John Wiley & Sons

DOWNLOAD EBOOK

This first book to cover the interaction of polymers with radiation from the entire electromagnetic spectrum adopts a multidisciplinary approach to bridge polym
Materials and Processes for Next Generation Lithography
Language: en
Pages: 636
Authors:
Categories: Science
Type: BOOK - Published: 2016-11-08 - Publisher: Elsevier

DOWNLOAD EBOOK

As the requirements of the semiconductor industry have become more demanding in terms of resolution and speed it has been necessary to push photoresist material
Electronic Design Automation for IC Implementation, Circuit Design, and Process Technology
Language: en
Pages: 798
Authors: Luciano Lavagno
Categories: Technology & Engineering
Type: BOOK - Published: 2017-02-03 - Publisher: CRC Press

DOWNLOAD EBOOK

The second of two volumes in the Electronic Design Automation for Integrated Circuits Handbook, Second Edition, Electronic Design Automation for IC Implementati